AOI-W500是针对晶圆表面缺陷检测的精密设备，检测方式采用机器视觉检测。设备具有同时检测上下两个面功能，根据工业相机成像的图形结果进行缺陷特征识别，并通过特定算法对缺陷进行判断并分类。

AOI-W500 is a precision equipment for wafer surface defects inspection, the inspection method adopts machine vision inspection. The equipment has the function of detecting the upper and lower surfaces simultaneously, and identifies the defect features according to the graphic results of the industrial camera imaging, and judges and classifies the defects through specific algorithms.