AOI-NM170设备主要用于COS芯片的全自动视觉检测分选,采用先进的基于人工智能AI的机器视觉检测技术和自主创新机构设计。
AOI-NM170 is mainly used for fully automatic visual inspection and sorting of COS chips, adopting advanced machine vision inspection technology based on artificial intelligence AI machine vision inspection technology and independent innovation.
打破了国外对COS芯片检测设备的垄断,检测像素精度达到了0.17μm(即170nm),可检出0.5μm以上的缺陷。检测合格率高达到了99.8%,处于国际领先水平;
AOI-NM170 broke the monopoly of foreign COS chip detection equipment, on COS chip inspection equipment, and the pixel precision of inspection reaches 0.17μm (i.e. 170nm), which can detect defects above 0.5μm. The passing rate of testing has reached 99.9%, which is at the international leading level.
采用独创AI算法,达到最佳检测效果;支持芯片的自动识别(芯片尺寸、位置、ID号等信息)、自动聚焦、定位、拾取、检测、产品高度检测等功能;
Adopting original Al algorithm to achieve the best detection effect. Supports automatic chip identification(chip size, position, ID number, and other information), automatic focusing, positioning, picking, detection, product height detection, and other functions.
自主创新机构设计,采用纳米级运动控制平台,有效保证了检测精度,大幅提升了检测效率;
Independently innovative mechanism design, adopting a nanoscale motion control platform, effectively ensuring detection accuracy and significantly improving detection efficiency.
▪ 检测精度:170nm/pixel(最高兼容34nm)
Detection precision: 170nm/pixel (up to 34nm compatible)
▪ 检测准确率:≥ 99.8%
Detection accuracy: ≥ 99.8%
▪ 检测缺陷种类:表面污染、镀膜异常、刮伤、断裂、破损、水波纹、暗裂纹等(突破了白纹、镀膜小点等外观瑕疵检测的行业瓶颈)
Types of Detection Defects:Surface contamination, abnormal coating, scratches, fractures, breaks, water ripples, dark cracks, etc.(Solved industry pain points such as substrate reflection,welding interference,etc., and broke through industry bottlenecks indetecting appearance defects such as white lines and coated spots.)